| Issue |
Title |
File |
| Vol 54, No 3 (2025) |
Structure of thin titanium nitride films deposited by magnetron sputtering |
(Rus)
|
|
Isaev A.G., Rogozhin A.E.
|
| Vol 54, No 3 (2025) |
Method for automated calculation of grains and voids in metal films and TSV-structures |
(Rus)
|
|
Dyuzhev N.A., Gusev E.E., Ivanin P.S., Zolnikov V.K., Fomichev M.Y.
|
| Vol 54, No 2 (2025) |
Measuring adhesion energy between MEMS structures using an adhered cantilever |
(Rus)
|
|
Uvarov I.V., Morozov O.V., Postnikov A.V., Svetovoy V.B.
|
| Vol 54, No 2 (2025) |
Regularities of X-ray transfer in doped multicomponent semiconductors for dosimetry |
(Rus)
|
|
Asadov S.M., Mustafaeva S.N., Lukichev V.F.
|
| Vol 53, No 6 (2024) |
Gas Phase Composition and Fluorine Atom Kinetics in SF6 Plasma |
(Rus)
|
|
Myakonkikh A.V., Kuzmenko V.O., Efremov A.M., Rudenko K.V.
|
| Vol 53, No 5 (2024) |
Electron cyclotron resonance plasma studies using the second cyclotron harmonic resonance |
(Rus)
|
|
Kovalchuk А.V., Shapoval S.Y.
|
| Vol 53, No 4 (2024) |
Study of the Photovoltaic Parameters of Inorganic Solar Cells Based on Cu2O and CuO |
(Rus)
|
|
Saenko A.V., Bilyk G.E., Smirnov V.A.
|
| Vol 53, No 3 (2024) |
A comprehensive study of nonuniformity properties of the LiCoO2 thin-film cathode fabricated by RF sputtering |
(Rus)
|
|
Kurbatov S.V., Rudy A.S., Naumov V.V., Mironenko A.A., Savenko O.V., Smirnova M.A., Mazaletsky L.A., Pukhov D.E.
|
| Vol 53, No 3 (2024) |
Influence of Hydrogen Additive on Electrophysical Parameters and Emission Spectra of Tetrafluoromethane Plasma |
(Rus)
|
|
Murin D.B., Grazhdyan A.Y., Chesnokov I.A., Gogulev I.A.
|
| Vol 53, No 2 (2024) |
Structural features and electrical properties of si(al) thermal migration channels for high-voltage photovoltaic converters |
(Rus)
|
|
Lomov A.A., Seredin B.M., Martyushov S.Y., Tatarintsev A.A., Popov V.P., Malibashev A.V.
|
| Vol 53, No 1 (2024) |
Analysis of Nonlinear Distortions of Dphemt Structures Based on a GaAs/InGaAs Compound with Double-Sided Delta-Doping |
(Rus)
|
|
Golikov O.L., Kodochigov N.E., Obolensky S.V., Puzanov A.S., Tarasova E.A., Khazanova S.V.
|
| Vol 53, No 1 (2024) |
Structuring of the Surface of Thin Carbon Films During Activation by Microsecond Current Pulses |
(Rus)
|
|
Nefedov D.V., Shabunin N.O., Bratashov D.N.
|
| Vol 52, No 6 (2023) |
PROBE AND SPECTRAL DIAGNOSTICS OF PLASMA GAS ENVIRONMENT: BCl3-Cl2 |
(Rus)
|
|
Murin D.B., Chesnokov I.A., Gogulev I.A., Grishkov A.E.
|
| Vol 52, No 5 (2023) |
Electrophysical Parameters and Emission Spectra of the Glow Discharge of Difluorodichloromethane |
(Rus)
|
|
Murin D.B., Chesnokov I.A., Gogulev I.A., Grishkov A.E.
|
| Vol 52, No 3 (2023) |
Surface Morphology and Photoluminescence Spectra of Pseudomorphic {InGaAs/GaAs} Superlattices on GaAs (100), (110), and (111)A Substrates |
(Rus)
|
|
Klimov E.A., Pushkarev S.S., Klochkov A.N., Mozhaeva M.O.
|
| Vol 52, No 2 (2023) |
SEM Measurements of the Dimensions of Relief Structures in the Technological Process of Manufacturing Microcircuits |
(Rus)
|
|
Novikov Y.A., Filippov M.N.
|
| Vol 52, No 1 (2023) |
Controlling Silicon Etching Parameters in RF CHF3 Plasma by Optical Emission Spectroscopy |
(Rus)
|
|
Murin D.B., Chesnokov I.A., Pivovarenok S.A., Efremov A.M.
|
| Vol 52, No 1 (2023) |
Электрофизические характеристики и эмиссионные спектры плазмы тетрафторметана |
(Rus)
|
|
Мурин Д., Пивоваренок С., Чесноков И., Гогулев И.
|
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